Cavity-Enhanced 2D Material Quantum Emitters Deterministically Integrated with Silicon Nitride Microresonators

Abstract

Optically active defects in 2D materials, such as hexagonal boron nitride (hBN) and transition metal dichalcogenides (TMDs), are an attractive class of single-photon emitters with high brightness, room-temperature operation, site-specific engineering of emitter arrays, and tunability with external strain and electric fields. In this work, we demonstrate a novel approach to precisely align and embed hBN and TMDs within background-free silicon nitride microring resonators. Through the Purcell effect, high-purity hBN emitters exhibit a cavity-enhanced spectral coupling efficiency up to $46\%$ at room temperature, which exceeds the theoretical limit for cavity-free waveguide-emitter coupling and previous demonstrations by nearly an order-of-magnitude. The devices are fabricated with a CMOS-compatible process and exhibit no degradation of the 2D material optical properties, robustness to thermal annealing, and 100 nm positioning accuracy of quantum emitters within single-mode waveguides, opening a path for scalable quantum photonic chips with on-demand single-photon sources.

References in corpus (12)

• Boson sampling with 20 input photons in 60-mode interferometers at $10^{14}$ state spaces
• Irradiation of Nanostrained Monolayer WSe${}_2$ for Site-Controlled Single-Photon Emission up to 150 K
• 422 Million Q Planar Integrated All-Waveguide Resonator with a 3.4 Billion Absorption Limited Q and Sub-MHz Linewidth
• Position-controlled quantum emitters with reproducible emission wavelength in hexagonal boron nitride
• Prospects and challenges of quantum emitters in 2D materials
• Site-Controlled Telecom Single-Photon Emitters in Atomically-thin MoTe2
• Bright single photon emitters with enhanced quantum efficiency in a two-dimensional semiconductor coupled with dielectric nano-antennas
• Room temperature single-photon emitters in silicon nitride
• Purcell-enhanced single photon source based on a deterministically placed WSe${}_2$ monolayer quantum dot in a circular Bragg grating cavity
• Mechanical Decoupling of Quantum Emitters in Hexagonal Boron Nitride from Low-Energy Phonon Modes
• Waveguide-integrated single-crystalline GaP resonators on diamond
• Manipulating Interlayer Excitons for Ultra-pure Near-infrared Quantum Light Generation

Cited by in corpus (11)

• Site-Controlled Purcell-Induced Bright Single Photon Emitters in Hexagonal Boron Nitride
• Rational Design of Efficient Defect-Based Quantum Emitters
• Top-down integration of a hBN quantum emitter in a monolithic photonic waveguide
• Time-dependent Mandel Q parameter analysis for a hexagonal boron nitride single photon source
• Quantum Emitters in Aluminum Nitride Induced by Zirconium Ion Implantation
• Nanocavity enhanced photon coherence of solid-state quantum emitters operating up to 30 K
• Deterministic Integration of hBN Single-Photon Emitters on SiN Waveguides via Femtosecond Laser Processing
• Van der Waals waveguide quantum electrodynamics probed by infrared nano-photoluminescence
• Dielectric environment engineering via 2D material heterostructure formation on hybrid photonic crystal nanocavity
• Spin-photon Qubits for Scalable Quantum Network
• A scalable method for cavity-enhanced solid-state quantum sensors