Integrating Graphene into Semiconductor Fabrication Lines
arXiv:1912.04090 · doi:10.1038/s41563-019-0359-7
Abstract
Electronic and photonic devices based on the two-dimensional material graphene have unique properties, leading to outstanding performance figures-of-merit. Mastering the integration of this new and unconventional material into an established semiconductor fabrication line represents a critical step for pushing it forward towards commercialization.