Deterministic integration of quantum dots into on-chip multi-mode interference beamsplitters using in-situ electron beam lithography

Abstract

The development of multi-node quantum optical circuits has attracted great attention in recent years. In particular, interfacing quantum-light sources, gates and detectors on a single chip is highly desirable for the realization of large networks. In this context, fabrication techniques that enable the deterministic integration of pre-selected quantum-light emitters into nanophotonic elements play a key role when moving forward to circuits containing multiple emitters. Here, we present the deterministic integration of an InAs quantum dot into a 50/50 multi-mode interference beamsplitter via in-situ electron beam lithography. We demonstrate the combined emitter-gate interface functionality by measuring triggered single-photon emission on-chip with $g^{(2)}(0)=0.13\pm 0.02$. Due to its high patterning resolution as well as spectral and spatial control, in-situ electron beam lithography allows for integration of pre-selected quantum emitters into complex photonic systems. Being a scalable single-step approach, it paves the way towards multi-node, fully integrated quantum photonic chips.

arXiv comment20 pages, 5 figures

References in corpus (25)

• Quantum Computing
• Photonic quantum technologies
• Interfacing single photons and single quantum dots with photonic nanostructures
• Silica-on-Silicon Waveguide Quantum Circuits
• Boson Sampling on a Photonic Chip
• Near-unity coupling efficiency of a quantum emitter to a photonic-crystal waveguide
• Quantum transport simulations in a programmable nanophotonic processor
• Shor's quantum factoring algorithm on a photonic chip
• Controlled light-matter coupling for a single quantum dot embedded in a pillar microcavity using far-field optical lithography
• Nanoscale optical positioning of single quantum dots for bright and pure single-photon emission
• Silicon Quantum Photonics
• Enhanced photon-extraction efficiency from deterministic quantum-dot microlenses
• Chirality of nanophotonic waveguide with embedded quantum emitter for unidirectional spin transfer
• A heterogeneous III-V/silicon integration platform for on-chip quantum photonic circuits with single quantum dot devices
• Hybrid integration of solid-state quantum emitters on a silicon photonic chip
• Multimode quantum interference of photons in multiport integrated devices
• Gallium Arsenide (GaAs) Quantum Photonic Waveguide Circuits
• On-chip time resolved detection of quantum dot emission using integrated superconducting single photon detectors
• On-chip generation, routing and detection of quantum light
• In-situ electron-beam lithography of deterministic single-quantum-dot mesa-structures using low-temperature cathodoluminescence spectroscopy
• Monolithic Integration of a Quantum Emitter with a Compact On-chip Beam-splitter
• Monolithic on-chip integration of semiconductor waveguides, beamsplitters and single-photon sources
• Resonance fluorescence of a site-controlled quantum dot realized by the buried-stressor growth technique
• Numerical analysis of nanostructures for enhanced light extraction from OLEDs
• CSAR 62 as negative-tone resist for high-contrast e-beam lithography at temperatures between 4 K and room temperature

Cited by in corpus (29)

• Deterministic coupling of site-controlled quantum emitters in monolayer semiconductors to plasmonic nanocavities
• Hybrid integration methods for on-chip quantum photonics
• Quantum dots for photonic quantum information technology
• Chiral topological photonics with an embedded quantum emitter
• Super-radiant emission from quantum dots in a nanophotonic waveguide
• Indistinguishable photons from deterministically integrated single quantum dots in heterogeneous GaAs/Si${}_3$N${}_4$ quantum photonic circuits
• Fully on-chip single-photon Hanbury-Brown and Twiss experiment on a monolithic semiconductor-superconductor platform
• Monolithic integration of single photon sources via evanescent coupling of tapered InP nanowires to SiN waveguides
• Deterministically Fabricated Solid-State Quantum-Light Sources
• Nonlinear quantum dot optomechanics
• Unidirectional single-photon emission from germanium-vacancy zero-phonon lines: Deterministic emitter-waveguide interfacing at plasmonic hot spots
• Deterministic positioning of nanophotonic waveguides around single self-assembled quantum dots
• In-situ wavelength tuning of quantum-dot single-photon sources integrated on a CMOS silicon chip
• On-chip generation and dynamic piezo-optomechanical rotation of single photons
• On-Chip Integration of Single Solid-State Quantum Emitters with a SiO${}_2$ Photonic Platform
• Directional emission of a deterministically fabricated quantum dot - Bragg reflection multi-mode waveguide system
• Assessing the alignment accuracy of state-of-the-art deterministic fabrication methods for single quantum dot devices
• Bright electrically controllable quantum-dot-molecule devices fabricated by in-situ electron-beam lithography
• A hybrid single quantum dot coupled cavity on a CMOS-compatible SiC photonic chip for Purcell-enhanced deterministic single-photon emission
• Sub-radiant states for imperfect quantum emitters coupled by a nanophotonic waveguide
• Numerical Investigation of Light Emission from Quantum Dots Embedded into On-Chip, Low Index Contrast Optical Waveguides
• Generation of genuine multipartite entangled states via indistinguishability of identical particles
• Directional coupling of emitters into waveguides: A symmetry perspective
• Design and fabrication of ridge waveguide-based nanobeam cavities for on-chip single-photon sources
• An integrated whispering-gallery-mode resonator for solid-state coherent quantum photonics
• Controlling coherence between waveguide-coupled quantum dots
• Reconfigurable quantum photonic circuits based on quantum dots
• A Concise Primer on Solid-State Quantum Emitters
• Directional single-photon emission from deterministic quantum dot waveguide structures