paper

Controlled formation of high-mobility shallow electron gases in SrTiO3 single crystal

arXiv:1511.00093 · doi:10.7567/APEX.8.055701

Abstract

We report controlled formation of sub-100 nm-thin electron channels in SrTiO by doping with oxygen vacancies induced by Ar-ion irradiation. The conducting channels exhibit a consistent high electron mobility (~15,000 cmVs), which enables clear observation of magnetic quantum oscillations, and gate-tunable linear magnetoresistance. Near the onset of electrical conduction, the metal-insulator transition is induced by the mobility suppression. With the high electron mobility and the ease of controlled channel formation, this ion-irradiation doping method may provide an excellent basis for developing oxide electronics.

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