Graphene nanoribbons: relevance of etching process
arXiv:1503.01921 · doi:10.1063/1.4921104
Abstract
Most graphene nanoribbons in the experimental literature are patterned using plasma etching. Various etching processes induce different types of defects and do not necessarily result in the same electronic and structural ribbon properties. This study focuses on two frequently used etching techniques, namely oxygen plasma ashing and oxygen/argon reactive ion etching (RIE). Oxygen plasma ashing represents an alternative to RIE physical etching for sensitive substrates, as it is a more gentle chemical process. We find that plasma ashing creates defective graphene in the exposed trenches, resulting in instabilities in the ribbon transport. These are probably caused by more or larger localized states at the edges of the ashed device compared to the RIE defined device.
revised version
References in corpus (17)
- The Raman Fingerprint of Graphene
- Energy Band Gap Engineering of Graphene Nanoribbons
- Room-Temperature Quantum Hall Effect in Graphene
- Probing the Nature of Defects in Graphene by Raman Spectroscopy
- Chaotic Dirac billiard in graphene quantum dots
- Graphene Nano-Ribbon Electronics
- Etching and Narrowing of Graphene from the Edges
- Coulomb blockade in graphene nanoribbons
- Etching of Graphene Devices with a Helium Ion Beam
- Effect of oxygen plasma etching on graphene studied with Raman spectroscopy and electronic transport
- Quantum dot behavior in graphene nanoconstrictions
- Fabrication of graphene nanoribbon by local anodic oxidation lithography using atomic force microscope
- Transport gap in side-gated graphene constrictions
- Density inhomogeneity driven percolation metal-insulator transition and dimensional crossover in graphene nanoribbons
- Reactive-Ion-Etched Graphene Nanoribbons on a Hexagonal Boron Nitride Substrate
- Characterizing wave functions in graphene nanodevices: electronic transport through ultrashort graphene constrictions on a boron nitride substrate
- Measuring the local quantum capacitance of graphene using a strongly coupled graphene nanoribbon