Fast time resolved techniques as key to the understanding of energy and particle transport in HPPMS-plasmas
arXiv:1405.5123 · doi:10.1109/TPS.2014.2330700
Abstract
High power pulsed magnetron sputtering (HPPMS) plasmas are pulsed discharges where the plasma composition as well as the fluxes and energies of ions are changing during the pulse. The time resolved energy distribution for Ar ions was measured and Phase Resolved Optical Emission Spectroscopy (PROES) for the Ar I line at 760 nm was done to get more insight in the transport properties of the plasma forming noble gas. These measurements were performed during HPPMS of titanium with argon at 0.5 Pa. The peak power density during the 50 s pulses was 1.8 kW/cm. In this contribution we demonstrate how time resolved mass spectrometry and ICCD cameras can be used to shed more light on energy and particle transport in HPPMS-plasmas.
The manuscript was submitted to the 7th Triennial Special Issue of the IEEE Transactions on Plasma Science "Images in Plasma Science," scheduled for publication in September 2014. The manuscript length is limited to 2 pages!