95 citations · 99 across the 2 of their papers we have counts for
2 papers
physics.plasm-ph2014★ 4 cited
Fast time resolved techniques as key to the understanding of energy and particle transport in HPPMS-plasmas
Christian Maszl, Wolfgang Breilmann, Lars Berscheid +2
High power pulsed magnetron sputtering (HPPMS) plasmas are pulsed discharges where the plasma composition as well as the fluxes and energies of ions are changing during the pulse.…
physics.plasm-ph2013★ 95 cited
Origin of the energetic ions at the substrate generated during high power pulsed magnetron sputtering of titanium
Christian Maszl, Wolfgang Breilmann, Jan Benedikt +1
HiPIMS plasmas generate energetic metal ions at the substrate as a major difference to conventional direct current magnetron sputtering. The origin of these ions is still an open i…