4 citations · 7 across the 9 of their papers we have counts for
9 papers
PECVD and PEALD on polymer substrates (part I): Fundamentals and analysis of plasma activation and thin film growth
Teresa de los Arcos, Peter Awakowicz, Jan Benedikt +17
This feature article considers the analysis of the initial states of film growth on polymer substrates. The assembled results are based on the cooperation between research groups i…
Multi-diagnostic approach to energy transport in an atmospheric pressure helium-oxygen plasma jet
Tristan Winzer, Natascha Blosczyk, Jan Benedikt +1
The energy balance of a plasma holds fundamental information not only about basic plasma physics, but it is also important for tailoring plasmas to specific applications. Especiall…
Fast time resolved techniques as key to the understanding of energy and particle transport in HPPMS-plasmas
Christian Maszl, Wolfgang Breilmann, Lars Berscheid +2
High power pulsed magnetron sputtering (HPPMS) plasmas are pulsed discharges where the plasma composition as well as the fluxes and energies of ions are changing during the pulse.…
Particle beam experiments for the investigation of plasma-surface interactions: application to magnetron sputtering and polymer treatment
Carles Corbella, Simon Grosse-Kreul, Oliver Kreiter +3
A beam experiment is presented to study heterogeneous reactions relevant to plasma-surface interactions. Atom and ion beams are focused onto the sample to expose it to quantified b…
The mystery of O and O3 production in the effluent of a He/O2 atmospheric pressure microplasma jet
Dirk Ellerweg, Achim von Keudell, Jan Benedikt
Microplasma jets are commonly used to treat samples in ambient air atmosphere. The effect of admixing air into the effluent may severely affect the composition of the emerging spec…
The role of VUV radiation in the inactivation of bacteria with an atmospheric pressure plasma jet
Simon Schneider, Jan-Wilm Lackmann, Dirk Ellerweg +4
A modified version of a micro scale atmospheric pressure plasma jet (μ-APPJ) source, so-called X-Jet, is used to study the role of plasma generated VUV photons in the inactivation…