Nano-fabricated solid immersion lenses registered to single emitters in diamond
arXiv:1012.1135 · doi:10.1063/1.3573870
Abstract
We describe a technique for fabricating micro- and nano-structures incorporating fluorescent defects in diamond with a positional accuracy in the hundreds of nanometers. Using confocal fluorescence microscopy and focused ion beam (FIB) etching we first locate a suitable defect with respect to registration marks on the diamond surface and then etch a structure using these coordinates. We demonstrate the technique here by etching an 8 micron diameter hemisphere positioned such that a single negatively charged nitrogen-vacancy defect lies at its origin. This type of structure increases the photon collection efficiency by removing refraction and aberration losses at the diamond-air interface. We make a direct comparison of the fluorescence photon count rate before and after fabrication and observe an 8-fold increase due to the presence of the hemisphere.
References in corpus (8)
- A Diamond Nanowire Single Photon Antenna
- Anisotropic interactions of a single spin and dark-spin spectroscopy in diamond
- Strongly enhanced photon collection from diamond defect centres under micro-fabricated integrated solid immersion lenses
- Room temperature stable single-photon source
- Integrated Diamond Optics for Single Photon Detection
- Chromium single photon emitters in diamond fabricated by ion implantation
- Nano-manipulation of diamond-based single photon sources
- Cavity Enhanced Spin Measurement of an NV Centre in Diamond
Cited by in corpus (56)
- Sensitivity Optimization for NV-Diamond Magnetometry
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- Efficient Extraction of Light from a Nitrogen-Vacancy Center in a Diamond Parabolic Reflector
- Diamond Integrated Quantum Photonics: A Review
- Magnetometry with nitrogen-vacancy ensembles in diamond based on infrared absorption in a doubly resonant optical cavity
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- Two-Dimensional Photonic Crystal Slab Nanocavities on Bulk Single-Crystal Diamond
- Nanoscale Sensing Using Point Defects in Single-Crystal Diamond: Recent Progress on Nitrogen Vacancy Center-Based Sensors
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- Electron spin contrast of Purcell-enhanced nitrogen-vacancy ensembles in nanodiamonds
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- Enhancing fluorescence excitation and collection from the nitrogen-vacancy center in diamond through a micro-concave mirror
- A cavity-based optical antenna for color centers in diamond
- Nuclear-spin-dependent coherent population trapping of single nitrogen vacancy centers in diamond
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- Decoherence by Optical Phonons in GaN Defect Single-Photon Emitters
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- Diamond Nitrogen-Vacancy Center Magnetometry: Advances and Challenges
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- Experimental testing of entropic uncertainty relations with multiple measurements in pure diamond
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