154 citations
- Kogakuin UniversityJP12 papers
- Korea Astronomy and Space Science InstituteKR12 papers
- National Astronomical Observatory of JapanJP12 papers
- The Graduate University for Advanced Studies, SOKENDAIJP12 papers
- The University of TokyoJP12 papers
- Chinese Academy of SciencesCN11 papers
- Harvard UniversityUS11 papers
- Instituto de Astrofísica de AndalucíaES11 papers
- Massachusetts Institute of TechnologyUS11 papers
- Max Planck Institute for Radio AstronomyDE11 papers
- Shanghai Jiao Tong UniversityCN11 papers
- Yonsei UniversityKR11 papers
4 papers · 1 filter
Modeling of very high frequency large-electrode capacitively coupled plasmas with a fully electromagnetic particle-in-cell code
D. Eremin, E. Kemaneci, M. Matsukuma +2
Phenomena taking place in capacitively coupled plasmas with large electrodes and driven at very high frequencies are studied numerically utilizing a novel energy- and charge-conser…
Excitation of a global plasma mode by an intense electron beam in a dc discharge
D. Sydorenko, I. D. Kaganovich, P. L. G. Ventzek +1
Interaction of an intense electron beam with a finite-length, inhomogeneous plasma is investigated numerically. The plasma density profile is maximal in the middle and decays towar…
Structure of Velocity Distribution of Sheath-Accelerated Secondary Electrons in Asymmetric RF-DC Discharge
Alexander V. Khrabrov, Igor D. Kaganovich, Peter L. G. Ventzek +2
The ballistic population is thought to be responsible for alleviating the electron shading effect and the notching of the photoresist layer. We have performed test-particle simulat…
Generation of anomalously energetic suprathermal electrons by an electron beam interacting with a nonuniform plasma
D. Sydorenko, I. D. Kaganovich, L. Chen +1
Generation of anomalously energetic suprathermal electrons was observed in simulation of a high- voltage dc discharge with electron emission from the cathode. An electron beam prod…