192 citations · 560 across the 26 of their papers we have counts for
26 papers
Collisionless Bulk Electron Heating in Resonant Low-Voltage Capacitively Coupled Plasmas
Sarveshwar Sharma, Igor D. Kaganovich, Animesh Kuley +3
We investigate collisionless power absorption in resonant, lowpressure capacitively coupled plasmas (CCPs). In these radio-frequency (RF) discharges, the sheath capacitance almo…
Ion-neutral and neutral-neutral scattering in argon at KeV energies and implications for high-aspect-ratio etching
Alexander V. Khrabrov, Igor D. Kaganovich
In this study, we report a physical model and a Monte Carlo simulation scheme developed to predict the angular distributions of energetic argon atoms and ions as an ion beam passes…
Particle-In-Cell Informed Kinetic Modeling of Nonlinear Skin Effects in Low-Frequency Inductively Coupled Plasmas
Haomin Sun, Jian Chen, Alexander Khrabrov +4
We perform extensive 2D Particle-In-Cell (PIC) electromagnetic simulations of low pressure Inductively Coupled Plasma (ICP) discharges with various coil current and driving frequen…
Nonlinear skin effect regime when a radio frequency electromagnetic field penetrates into a background plasma
Haomin Sun, Jian Chen, Alexander Khrabrov +4
Two-dimensional, electromagnetic particle-in-cell simulations are employed to study particle kinetics and power deposition in the skin layer when a Radio Frequency (RF) electromagn…
Improved algorithm for a two-dimensional Darwin particle-in-cell code
Dmytro Sydorenko, Igor D. Kaganovich, Alexander V. Khrabrov +3
A two-dimensional particle-in-cell code for simulation of low-frequency electromagnetic processes in laboratory plasmas has been developed. The code uses the Darwin method omitting…
Investigating Instabilities in Magnetized Low-pressure Capacitively-Coupled RF Plasma using Particle-in-Cell (PIC) Simulations
Sathya Ganta, Kallol Bera, Shahid Rauf +5
The effect of a uniform magnetic field on particle transport in low-pressure radio frequency (RF) capacitively coupled plasma (CCP) has been studied using a particle-in-cell (PIC)…
Establishing Criteria for the Transition from Kinetic to Fluid Modeling in Hollow Cathode Analysis
Willca Villafana, Andrew T. Powis, Sarveshwar Sharma +2
In this study, we conduct 2D3V Particle-In-Cell simulations of hollow cathodes, encompassing both the channel and plume region, with an emphasis on plasma switch applications. The…
Modeling the low-pressure high-voltage branch of the Paschen curve for hydrogen and deuterium
Alexander V. Khrabrov, David. J. Smith, Igor D. Kaganovich
A physical and numerical model of the Townsend discharge in molecular hydrogen and deuterium has been developed to meet the needs of designing a plasma-based switching device for p…
Numerical thermalization in 2D PIC simulations: Practical estimates for low temperature plasma simulations
Sierra Jubin, Andrew Tasman Powis, Willca Villafana +5
The process of numerical thermalization in particle-in-cell (PIC) simulations has been studied extensively. It is analogous to Coulomb collisions in real plasmas, causing particle…
Particle-in-cell simulation of a 50~mTorr capacitively coupled argon discharge over a range of frequencies
Saurabh Simha, Sarveshwar Sharma, Alexander Khrabrov +3
The effect of driving frequency in the range of 13.56 MHz to 73 MHz on electron energy distribution and electron heating modes in a 50 mTorr capacitively coupled argon plasma disch…
Direct Implicit and Explicit Energy-Conserving Particle-in-Cell Methods for Modeling of Capacitively-Coupled Plasma Devices
Haomin Sun, Soham Banerjee, Sarveshwar Sharma +5
Achieving large-scale kinetic modelling is a crucial task for the development and optimization of modern plasma devices. With the trend of decreasing pressure in applications such…
Study of Synchronous RF Pulsing in Dual Frequency Capacitively Coupled Plasma
Abhishek Verma, Shahid Rauf, Kallol Bera +3
Low-pressure multi-frequency capacitively coupled plasmas are used for numerous etch and deposition applications in the semiconductor industry. Pulsing of the radio-frequency (RF)…
Particle-in-cell modeling of electron beam generated plasma
Shahid Rauf, D. Sydorenko, S. Jubin +4
Plasmas generated using energetic electron beams are well known for their low electron temperature () and plasma potential, which makes them attractive for atomic-precision…
Electron heating in a current-driven turbulence as a result of nonlinear interaction of electron- and ion-acoustic waves
Jian Chen, Alexander V. Khrabrov, Igor D. Kaganovich +1
We study electron heating in collisionless current-driven turbulence due to the nonlinear interactions between electron- and ion-acoustic waves. PIC simulation results show that du…
Investigating the effects of electron bounce-cyclotron resonance on plasma dynamics in capacitive discharges operated in the presence of a weak transverse magnetic field
Sarveshwar Sharma, Sanket Patil, Sudip Sengupta +3
Recently, S Patil et al. have reported the existence of an enhanced operating regime when a low-pressure (5 mTorr) capacitively coupled discharge (CCP) is driven by a very high rad…
Electron Modulational Instability in the Strong Turbulent Regime for an Electron Beam Propagating in Background Plasma
Haomin Sun, Jian Chen, Igor D. Kaganovich +2
We study collective processes for an electron beam propagating through a background plasma using simulations and analytical theory. A new regime where the instability of a Langmuir…
Physical Regimes of Electrostatic Wave-Wave nonlinear interactions generated by an Electron Beam Propagating in a Background Plasma
Haomin Sun, Jian Chen, Igor D. Kaganovich +2
Electron-beam plasma interaction has long been a topic of great interest. Despite the success of Quasi-Linear (QL) theory and Weak Turbulence (WT) theory, their validities are limi…
Collisionless Adiabatic Afterglow
Alexander V. Khrabrov, Igor D. Kaganovich, Jian Chen +1
We study, by numerical and analytical means, the evolution of a uniform one-dimensional collisionless plasma initiated between plane absorbing walls. The ensuing flow is described…
Perspectives on Physics of ExB Discharges Relevant to Plasma Propulsion and Similar Technologies
Igor D. Kaganovich, Andrei Smolyakov, Yevgeny Raitses +22
This paper provides perspectives on recent progress in the understanding of the physics of devices where the external magnetic field is applied perpendicularly to the discharge cur…
Convenient Analytical Solution for Vibrational Distribution Function of Molecules Colliding with a Wall
Wei Yang, Alexander V. Khrabrov, Igor D. Kaganovich +1
We study formation of the Vibrational Distribution Function (VDF) in a molecular gas at low pressure, when vibrational levels are excited by electron impact and deactivated in coll…
Benchmarking and validation of global model code for negative hydrogen ion sources
Wei Yang, Sergey N. Averkin, Alexander V. Khrabrov +2
Benchmarking and validation are prerequisite for using simulation codes as predictive tools. In this work, we have developed a Global Model for Negative Hydrogen Ion Source (GMNHIS…
Analytical model of three regimes of cold cathode breakdown in helium
Liang Xu, Alexander V. Khrabrov, Igor D. Kaganovich +1
An analytical model has been developed to map out the low-pressure (left-hand) branch of the Paschen curve at very high voltage when electrons are in the runaway regime and charge…
Validation and benchmarking of two particle-in-cell codes for a glow discharge
Johan Carlsson, Alexander Khrabrov, Igor Kaganovich +2
The two particle-in-cell codes EDIPIC and LSP are benchmarked and validated for a parallel-plate glow discharge in helium, in which the axial electric field had been carefully meas…
Spatial symmetry breaking in single-frequency CCP discharge with transverse magnetic field
Sarveshwar Sharma, Igor Kaganovich, Alexander Khrabrov +2
An independent control of the flux and energy of ions impacting on an object immersed in a plasma is often desirable for many industrial processes such as microelectronics manufact…