output
20012021
most citedFerroelectric and anti-ferroelectric coupling in superlattices of paraelectric perovskites at room temperature

79 citations

researchers with a paper here

Counting papers with at most 25 authors, so collaboration author lists do not stand in for the people here.

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Showing 2011Show all

2 papers · 1 filter

cond-mat.mtrl-sci2011★ 10 cited

Noncontact electrical metrology of Cu/low-k interconnect for semiconductor production wafers

V. V. Talanov, A. Scherz, A. R. Schwartz

We have demonstrated a technique capable of in-line measurement of dielectric constant of low-k interconnect films on patterned wafers utilizing a test key of ~50x50 μm in size. Th…

cond-mat.mtrl-sci2011★ 32 cited

Noncontact dielectric constant metrology of low-k interconnect films using a near-field scanned microwave probe

Vladimir V. Talanov, André Scherz, Robert L. Moreland +1

We present a method for noncontact, noninvasive measurements of dielectric constant, k, of 100-nm- to 1.5-μm-thick blanket low-k interconnect films on up to 300 mm in diameter wafe…