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most citedFerroelectric and anti-ferroelectric coupling in superlattices of paraelectric perovskites at room temperature

79 citations

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Counting papers with at most 25 authors, so collaboration author lists do not stand in for the people here.

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Showing cond-mat.mtrl-sciShow all

5 papers · 1 filter

cond-mat.mtrl-sci2011★ 10 cited

Noncontact electrical metrology of Cu/low-k interconnect for semiconductor production wafers

V. V. Talanov, A. Scherz, A. R. Schwartz

We have demonstrated a technique capable of in-line measurement of dielectric constant of low-k interconnect films on patterned wafers utilizing a test key of ~50x50 μm in size. Th…

cond-mat.mtrl-sci2011★ 32 cited

Noncontact dielectric constant metrology of low-k interconnect films using a near-field scanned microwave probe

Vladimir V. Talanov, André Scherz, Robert L. Moreland +1

We present a method for noncontact, noninvasive measurements of dielectric constant, k, of 100-nm- to 1.5-μm-thick blanket low-k interconnect films on up to 300 mm in diameter wafe…

cond-mat.mtrl-sci2005★ 60 cited

A near-field scanned microwave probe for spatially localized electrical metrology

Vladimir V. Talanov, Andre Scherz, Robert L. Moreland +1

We have developed a near-field scanned microwave probe with a sampling volume of approximately 10 micron in diameter, which is the smallest one achieved in near-field microwave mic…

cond-mat.mtrl-sci2003★ 79 cited

Ferroelectric and anti-ferroelectric coupling in superlattices of paraelectric perovskites at room temperature

Hans M. Christen, Eliot D. Specht, Sherwood S. Silliman +1

Results from dielectric and structural measurements on epitaxial SrTiO/BaZrO superlattices reveal properties that cannot be explained simply in terms of those measured on s…

cond-mat.mtrl-sci2001★ 78 cited

A continuous compositional-spread technique based on pulsed-laser deposition and applied to the growth of epitaxial films

H. M. Christen, S. D. Silliman, K. S. Harshavardhan

A novel continuous-compositional spread technique based on the non-uniformity of the deposition rate typically observed in Pulsed Laser Deposition (PLD) is introduced. The approach…