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- ETH ZurichCH124 papers
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Showing 2017 · physics.app-phShow all
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physics.app-ph2017★ 35 cited
High aspect ratio metal microcasting by hot embossing for X-ray optics fabrication
Lucia Romano, Joan Vila-Comamala, Matias Kagias +4
Metal microstructured optical elements for grating-based X-ray phase-contrast interferometry were fabricated by using an innovative approach of microcasting: hot embossing technolo…
physics.app-ph2017★ 47 cited
Effect of Isopropanol on Gold Assisted Chemical Etching of Silicon Microstructures
Lucia Romano, Joan Vila-Comamalab, Konstantins Jefimovs +1
Wet etching is an essential and complex step in semiconductor device processing. Metal-Assisted Chemical Etching (MacEtch) is fundamentally a wet but anisotropic etching method. In…