47 citations · 196 across the 7 of their papers we have counts for
7 papers
Fabrication of a Silicon Electron Multiplier sensor using Metal Assisted Chemical Etching and its characterisation
Marius Mæhlum Halvorsen, Victor Coco, Paula Collins +2
The Silicon Electron Multiplier (SiEM) sensor is a novel sensor concept that enables charge multiplication by high electric fields generated by embedded metal electrodes within the…
High aspect ratio silicon structures by Displacement Talbot lithography and Bosch etching
Konstantins Jefimovs, Lucia Romano, Joan Vila-Comamala +6
Despite the fact that the resolution of conventional contact/proximity lithography can reach feature sizes down to ~0.5-0.6 micrometers, the accurate control of the linewidth and u…
Hot embossing of Au- and Pb- based alloys for X ray grating fabrication
Lucia Romano, Joan Vila-Comamala, Helmut Schift +1
Grating-based X-ray phase-contrast interferometry has a high application impact in material science and medicine for imaging of weakly absorbing (low Z) materials and soft tissues.…
Towards Sub-micrometer High Aspect Ratio X-ray Gratings by Atomic Layer Deposition of Iridium
Joan Vila-Comamala, Lucia Romano, Vitaliy Guzenko +3
X-ray grating interferometry is an excellent technique for X-ray phase contrast imaging and X-ray wavefront sensing with applications in materials science, biology and medical diag…
High aspect ratio metal microcasting by hot embossing for X-ray optics fabrication
Lucia Romano, Joan Vila-Comamala, Matias Kagias +4
Metal microstructured optical elements for grating-based X-ray phase-contrast interferometry were fabricated by using an innovative approach of microcasting: hot embossing technolo…
Effect of Isopropanol on Gold Assisted Chemical Etching of Silicon Microstructures
Lucia Romano, Joan Vila-Comamalab, Konstantins Jefimovs +1
Wet etching is an essential and complex step in semiconductor device processing. Metal-Assisted Chemical Etching (MacEtch) is fundamentally a wet but anisotropic etching method. In…