activity
20162023
most citedEffect of Isopropanol on Gold Assisted Chemical Etching of Silicon Microstructures

47 citations · 201 across the 7 of their papers we have counts for

collaborators

7 papers

physics.med-ph2023★ 1 cited

Refraction beats attenuation in breast CT

Michał Rawlik, Alexandre Pereira, Simon Spindler +17

For a century, clinical X-ray imaging has visualised only the attenuation properties of tissue, which fundamentally limits the contrast, particularly in soft tissues like the breas…

physics.app-ph2022

High aspect ratio arrays of Si nano-pillars using displacement Talbot lithography and gas-MacEtch

Z. Shi, K. Jefimovs, M. Stampanoni +1

Structuring Si in arrays of vertical high aspect ratio pillars, ranging from nanoscale to macroscale feature dimensions, is essential for producing functional interfaces for many a…

physics.app-ph2018★ 36 cited

High aspect ratio silicon structures by Displacement Talbot lithography and Bosch etching

Konstantins Jefimovs, Lucia Romano, Joan Vila-Comamala +6

Despite the fact that the resolution of conventional contact/proximity lithography can reach feature sizes down to ~0.5-0.6 micrometers, the accurate control of the linewidth and u…

physics.app-ph2018★ 46 cited

Towards Sub-micrometer High Aspect Ratio X-ray Gratings by Atomic Layer Deposition of Iridium

Joan Vila-Comamala, Lucia Romano, Vitaliy Guzenko +3

X-ray grating interferometry is an excellent technique for X-ray phase contrast imaging and X-ray wavefront sensing with applications in materials science, biology and medical diag…

physics.app-ph2017★ 35 cited

High aspect ratio metal microcasting by hot embossing for X-ray optics fabrication

Lucia Romano, Joan Vila-Comamala, Matias Kagias +4

Metal microstructured optical elements for grating-based X-ray phase-contrast interferometry were fabricated by using an innovative approach of microcasting: hot embossing technolo…

physics.app-ph2017★ 47 cited

Effect of Isopropanol on Gold Assisted Chemical Etching of Silicon Microstructures

Lucia Romano, Joan Vila-Comamalab, Konstantins Jefimovs +1

Wet etching is an essential and complex step in semiconductor device processing. Metal-Assisted Chemical Etching (MacEtch) is fundamentally a wet but anisotropic etching method. In…

cond-mat.soft2016★ 36 cited

Anisotropic de Gennes narrowing in confined fluids

Kim Nygard, Johan Buitenhuis, Matias Kagias +3

The collective diffusion of dense fluids in spatial confinement was studied by combining high-energy (21 keV) x-ray photon correlation spectroscopy and small-angle x-ray scattering…