47 citations · 82 across the 2 of their papers we have counts for
5 papers
High aspect ratio silicon structures by Displacement Talbot lithography and Bosch etching
Konstantins Jefimovs, Lucia Romano, Joan Vila-Comamala +6
Despite the fact that the resolution of conventional contact/proximity lithography can reach feature sizes down to ~0.5-0.6 micrometers, the accurate control of the linewidth and u…
Towards Sub-micrometer High Aspect Ratio X-ray Gratings by Atomic Layer Deposition of Iridium
Joan Vila-Comamala, Lucia Romano, Vitaliy Guzenko +3
X-ray grating interferometry is an excellent technique for X-ray phase contrast imaging and X-ray wavefront sensing with applications in materials science, biology and medical diag…
High aspect ratio metal microcasting by hot embossing for X-ray optics fabrication
Lucia Romano, Joan Vila-Comamala, Matias Kagias +4
Metal microstructured optical elements for grating-based X-ray phase-contrast interferometry were fabricated by using an innovative approach of microcasting: hot embossing technolo…
Effect of Isopropanol on Gold Assisted Chemical Etching of Silicon Microstructures
Lucia Romano, Joan Vila-Comamalab, Konstantins Jefimovs +1
Wet etching is an essential and complex step in semiconductor device processing. Metal-Assisted Chemical Etching (MacEtch) is fundamentally a wet but anisotropic etching method. In…
Anisotropic de Gennes narrowing in confined fluids
Kim Nygard, Johan Buitenhuis, Matias Kagias +3
The collective diffusion of dense fluids in spatial confinement was studied by combining high-energy (21 keV) x-ray photon correlation spectroscopy and small-angle x-ray scattering…