47 citations · 201 across the 7 of their papers we have counts for
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physics.app-ph2018★ 36 cited
High aspect ratio silicon structures by Displacement Talbot lithography and Bosch etching
Konstantins Jefimovs, Lucia Romano, Joan Vila-Comamala +6
Despite the fact that the resolution of conventional contact/proximity lithography can reach feature sizes down to ~0.5-0.6 micrometers, the accurate control of the linewidth and u…
physics.app-ph2018★ 46 cited
Towards Sub-micrometer High Aspect Ratio X-ray Gratings by Atomic Layer Deposition of Iridium
Joan Vila-Comamala, Lucia Romano, Vitaliy Guzenko +3
X-ray grating interferometry is an excellent technique for X-ray phase contrast imaging and X-ray wavefront sensing with applications in materials science, biology and medical diag…