Wafer scale reactive sputtering of highly oriented and ferroelectric Al${}_{0.6}$Sc${}_{0.4}$N from 300 mm AlSc Targets

Tom-Niklas Kreutzer, Muhammad Zubair Ghori, Md Redwanul Islam +4

This paper presents progress towards the large-scale manufacturability of piezo- and ferroelectric Al${}_{1-x}$Sc${}_x$N thin films with very high Sc content. Al${}_{0.6}$Sc${}_{0.4}$N lay…