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3 papers
Wafer scale reactive sputtering of highly oriented and ferroelectric AlScN from 300 mm AlSc Targets
Tom-Niklas Kreutzer, Muhammad Zubair Ghori, Md Redwanul Islam +4
This paper presents progress towards the large-scale manufacturability of piezo- and ferroelectric AlScN thin films with very high Sc content. AlScN lay…
Improved Leakage Currents and Polarity Control through Oxygen Incorporation in Ferroelectric Al0.73Sc0.27N Thin Films
Md Redwanul Islam, Niklas Wolff, Georg Schönweger +8
This article examines systematic oxygen (O)-incorporation to reduce total leakage currents in sputtered wurtzite-type ferroelectric Al0.73Sc0.27N thin films, along with its impact…
Ferroelectricity in AlScN: Switching, Imprint and sub-150 nm Films
Simon Fichtner, Georg Schönweger, Tom-Niklas Kreutzer +4
The discovery of ferroelectricity in AlScN allowed the first clear observation of the effect in the wurtzite crystal structure, resulting in a material with a previously unpreceden…