Tom-Niklas Kreutzer

activity

20202025

most citedWafer scale reactive sputtering of highly oriented and ferroelectric Al

_{0.6}

_{0.4}

N from 300 mm AlSc Targets

2 citations · 3 across the 2 of their papers we have counts for

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cond-mat.mtrl-sci2025★ 2 cited

Wafer scale reactive sputtering of highly oriented and ferroelectric Al $_{0.6}$ Sc $_{0.4}$ N from 300 mm AlSc Targets

Tom-Niklas Kreutzer, Muhammad Zubair Ghori, Md Redwanul Islam +4

This paper presents progress towards the large-scale manufacturability of piezo- and ferroelectric Al $_{1 - x}$ Sc $_{x}$ N thin films with very high Sc content. Al $_{0.6}$ Sc $_{0.4}$ N lay…

cond-mat.mtrl-sci2020

Ferroelectricity in AlScN: Switching, Imprint and sub-150 nm Films

Simon Fichtner, Georg Schönweger, Tom-Niklas Kreutzer +4

The discovery of ferroelectricity in AlScN allowed the first clear observation of the effect in the wurtzite crystal structure, resulting in a material with a previously unpreceden…

Wafer scale reactive sputtering of highly oriented and ferroelectric Al0.6​Sc0.4​N from 300 mm AlSc Targets

Ferroelectricity in AlScN: Switching, Imprint and sub-150 nm Films

Wafer scale reactive sputtering of highly oriented and ferroelectric Al $_{0.6}$ Sc $_{0.4}$ N from 300 mm AlSc Targets