8 citations
2 papers
cs.AR2023★ 7 cited
A BEOL Compatible, 2-Terminals, Ferroelectric Analog Non-Volatile Memory
Laura Bégon-Lours, Mattia Halter, Diana Dávila Pineda +6
A Ferroelectric Analog Non-Volatile Memory based on a WOx electrode and ferroelectric HfZrO layer is fabricated at a low thermal budget (~375C), enabling BEOL processes…
cs.AR2023★ 8 cited
A Back-End-Of-Line Compatible, Ferroelectric Analog Non-Volatile Memory
Laura Bégon-Lours, Mattia Halter, Diana Dávila Pineda +6
A Ferroelectric Analog Non-Volatile Memory based on a WOx electrode and ferroelectric HfZrO4 layer is fabricated at a low thermal budget (~375C), enabling BEOL processes and CMOS i…