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physics.data-an2022★ 6 cited
Demystifying the measurement of periodic structures
David Nečas, Andrew Yacoot, Petr Klapetek
Periodic structures are often found in various areas of nanoscience and nanotechnology with many of them being used for metrological purposes either to calibrate instruments, or fo…
physics.data-an2020★ 17 cited
Estimation of roughness measurement bias originating from background subtraction
David Nečas, Petr Klapetek, Miroslav Valtr
When measuring the roughness of rough surfaces, the limited sizes of scanned areas lead to its systematic underestimation. Levelling by polynomials and other filtering used in real…