783 citations
- EdgeWave (Germany)DE12 papers
- Deutsches Elektronen-Synchrotron DESYDE11 papers
- University of EdinburghGB11 papers
- University of LiverpoolGB11 papers
- University of RegensburgDE11 papers
- John von Neumann Institute for ComputingDE8 papers
- Technical University of MunichDE4 papers
- Physikalisch-Technische BundesanstaltDE3 papers
- Technische Universität BerlinDE3 papers
- Advanced Mask Technology Center (Germany)DE2 papers
- Freie Universität BerlinDE2 papers
- Leipzig UniversityDE2 papers
Showing 2012 · physics.opticsShow all
2 papers · 2 filters
physics.optics2012★ 27 cited
Analytical modeling and 3D finite element simulation of line edge roughness in scatterometry
A. Kato, S. Burger, F. Scholze
The influence of edge roughness in angle resolved scatterometry at periodically structured surfaces is investigated. A good description of the radiation interaction with structured…
physics.optics2012★ 13 cited
Localized surface plasmon modes in a system of two interacting metallic cylinders
Viktoriia E. Babicheva, Sergey S. Vergeles, Petr E. Vorobev +1
We study an optical response of a system of two parallel close metallic cylinders having nanoscale dimensions. Surface plasmon excitation in the gap between the cylinders are speci…