102 citations
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cs.IT2020★ 1 cited
Spectral Ranking of Causal Influence in Complex Systems
Errol Zalmijn, Tom Heskes, Tom Claassen
Like natural complex systems such as the Earth's climate or a living cell, semiconductor lithography systems are characterized by nonlinear dynamics across more than a dozen orders…
physics.plasm-ph2020★ 1 cited
Particle lofting from substrate exposed to plasma and electron beam
P. V. Krainov, V. V. Ivanov, D. I. Astakhov +4
A nanometer-sized dielectric particle lying on a dielectric substrate is exposed to the flux of low-energy electrons, ion and electron fluxes from a cold plasma and the fluxes from…