30 citations · 55 across the 3 of their papers we have counts for
3 papers
Quantum dot photoluminescence as a versatile probe to visualize the interaction between plasma and nanoparticles on a surface
Zahra Marvi, Tim Donders, Mohammad Hasani +2
We experimentally demonstrate that the interaction between plasma and nanometer-sized semiconductor quantum dots (QDs) is directly connected to a change in their photoluminescence…
Exploring the electron density in plasma induced by EUV radiation: II. Numerical studies in argon and hydrogen
D. I. Astakhov, W. J. Goedheer, C. J. Lee +8
We used numerical modeling to study the evolution of EUV-induced plasmas in argon and hydrogen. The results of simulations were compared to the electron densities measured by micro…
Exploring the electron density in plasmas induced by extreme ultraviolet radiation in argon
R. M. van der Horst, J. Beckers, E. A. Osorio +1
The new generation of lithography tools use high energy EUV radiation which ionizes the present background gas due to photoionization. To predict and understand the long term impac…