32 citations · 96 across the 7 of their papers we have counts for
7 papers
Resistless EUV lithography: photon-induced oxide patterning on silicon
Li-Ting Tseng, Prajith Karadan, Dimitrios Kazazis +7
In this work, we show the feasibility of extreme ultraviolet (EUV) patterning on an HF-treated Si(100) surface in the absence of a photoresist. EUV lithography is the leading litho…
Energy efficient manipulation of topologically protected states in non-volatile ultrafast charge configuration memory devices
Anze Mraz, Rok Venturini, Michele Diego +13
Non-volatile magnetic storage, from 1940s magnetic core to present day racetrack memory and magnetic anisotropy switching devices rely on the metastability of magnetic domains to s…
Improving the Resolution and Throughput of Achromatic Talbot Lithography
Dimitrios Kazazis, Li-Ting Tseng, Yasin Ekinci
High-resolution patterning of periodic structures over large areas has several applications in science and technology. One such method, based on the long-known Talbot effect observ…
Changes in the near edge X-ray absorption fine structure of hybrid organic-inorganic resists upon exposure
Roberto Fallica, Benjamin Watts, Benedikt Rösner +4
We report on the near edge X-ray absorption fine structure (NEXAFS) spectroscopy of hybrid organic-inorganic resists. These materials are nonchemically amplified systems based on S…
Lithographic performance of ZEP520A and mr-PosEBR resists exposed by electron beam and extreme ultraviolet lithography
Roberto Fallica, Dimitrios Kazazis, Robert Kirchner +4
Pattern transfer by deep anisotropic etch is a well-established technique for fabrication of nanoscale devices and structures. For this technique to be effective, the resist materi…
A comparative study of resists and lithographic tools using the Lumped Parameter Model
Roberto Fallica, Robert Kirchner, Dominique Mailly +1
A comparison of the performance of high resolution lithographic tools is presented here. We use extreme ultraviolet interference lithography, electron beam lithography, and He ion…
Magnetic metamaterials in the blue range using aluminum nanostructures
Yogesh Jeyaram, Shankar K. Jha, Mario Agio +2
We report an experimental and theoretical study of the optical properties of two-dimensional arrays of aluminum nanoparticle in-tandem pairs. Plasmon resonances and effective optic…