32 citations · 96 across the 7 of their papers we have counts for
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physics.app-ph2018★ 10 cited
Improving the Resolution and Throughput of Achromatic Talbot Lithography
Dimitrios Kazazis, Li-Ting Tseng, Yasin Ekinci
High-resolution patterning of periodic structures over large areas has several applications in science and technology. One such method, based on the long-known Talbot effect observ…
physics.app-ph2018★ 9 cited
Changes in the near edge X-ray absorption fine structure of hybrid organic-inorganic resists upon exposure
Roberto Fallica, Benjamin Watts, Benedikt Rösner +4
We report on the near edge X-ray absorption fine structure (NEXAFS) spectroscopy of hybrid organic-inorganic resists. These materials are nonchemically amplified systems based on S…