102 citations · 888 across the 25 of their papers we have counts for
Showing 2018Show all
2 papers · 1 filter
physics.plasm-ph2018★ 48 cited
Ion energy and angular distributions in low-pressure capacitive oxygen RF discharges driven by tailored voltage waveforms
Zoltan Donko, Aranka Derzsi, Mate Vass +3
We investigate the energy and angular distributions of the ions reaching the electrodes in low-pressure, capacitively coupled oxygen radio-frequency discharges. These distributions…
physics.plasm-ph2018★ 54 cited
Multi frequency matching for voltage waveform tailoring
Frederik Schmidt, Julian Schulze, Erik Johnson +5
Customized voltage waveforms composed of a number of frequencies and used as the excitation of radio-frequency plasmas can control various plasma parameters such as energy distribu…