42 citations · 82 across the 2 of their papers we have counts for
3 papers
Striations in electronegative capacitively coupled radio-frequency plasmas: effects of the pressure, voltage, and electrode gap
Yong-Xin Liu, Ihor Korolov, Edmund Schüngel +3
Capacitively coupled radio-frequency (CCRF) CF_4 plasmas have been found to exhibit a self-organized striated structure at operating conditions, where the plasma is strongly electr…
Striations in electronegative capacitively coupled radio-frequency plasmas: analysis of the pattern formation and the effect of the driving frequency
Yong-Xin Liu, Ihor Korolov, Edmund Schüngel +3
Self-organized striated structures of the plasma emission have recently been observed in capacitive radio-frequency CF4 plasmas by Phase Resolved Optical Emission Spectroscopy (PRO…
On the self-excitation mechanisms of Plasma Series Resonance oscillations in single- and multi-frequency capacitive discharges
Edmund Schuengel, Steven Brandt, Ihor Korolov +3
The self-excitation of plasma series resonance (PSR) oscillations is a prominent feature in the current of low pressure capacitive radio frequency (RF) discharges. This resonance l…