102 citations · 888 across the 25 of their papers we have counts for
25 papers
Experimental validation of particle-in-cell/Monte Carlo collisions simulations in low-pressure neon capacitively coupled plasmas
Chan-Won Park, Benedek Horváth, Aranka Derzsi +4
Plasma simulations are powerful tools for understanding fundamental plasma science phenomena and for process optimization in applications. To ensure their quantitative accuracy, th…
Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges
Katharina Noesges, Maximilian Klich, Aranka Derzsi +5
In capacitively coupled radio frequency (CCRF) discharges, the interaction of the plasma and the surface boundaries is linked to a variety of highly relevant phenomena for technolo…
Electron dynamics in planar radio frequency magnetron plasmas: III. Comparison of experimental investigations of power absorption dynamics to simulation results
Birk Berger, Denis Eremin, Moritz Oberberg +7
In magnetized capacitively coupled radio-frequency discharges operated at low pressure the influence of the magnetic flux density on discharge properties has been studied recently…
Electron dynamics in planar radio frequency magnetron plasmas: I. The mechanism of Hall heating and the μ-mode
Denis Eremin, Dennis Engel, Dennis Krüger +9
The electron dynamics and the mechanisms of power absorption in radio-frequency (RF) driven, magnetically enhanced capacitively coupled plasmas (MECCPs) at low pressure are investi…
Electron dynamics in planar radio frequency magnetron plasmas: II. Heating and energization mechanisms studied via a 2d3v particle-in-cell/Monte Carlo code
D. Eremin, B. Berger, D. Engel +10
The present work investigates electron transport and heating mechanisms using an (r, z) particle-in-cell (PIC) simulation of a typical rf-driven axisymmetric magnetron discharge wi…
Electron power absorption in capacitively coupled neon-oxygen plasmas: a comparison of experimental and computational results
A. Derzsi, P. Hartmann, M. Vass +5
Phase Resolved Optical Emission Spectroscopy (PROES) measurements combined with 1d3v Particle-in-Cell/Monte Carlo Collisions (PIC/MCC) simulations are used to study the electron po…