16 citations · 17 across the 5 of their papers we have counts for
5 papers
Non-invasive monitoring of process-relevant plasma parameters by Fiber PROES in capacitively coupled Ar/CF plasmas
Florian Beckfeld, Maximilian Ryppa, Constantin Neuroth +3
Monitoring changes of process-relevant plasma parameters, such as the electron density and ion flux to the wafer, is essential for the development and control of plasma processes.…
Electron dynamics of three distinct discharge modes of a cross-field atmospheric pressure plasma jet
Maximilian Klich, David Alexander Schulenberg, Sebastian Wilczek +6
This paper investigates the electron dynamics in three distinct discharge modes of a cross-field atmospheric pressure plasma jet, the COST-Jet. Thereby, the discharge modes are the…
Electron dynamics and particle transport in capacitively coupled Ar/O2 discharges driven by sawtooth up voltage waveforms
Wan Dong, Zhuo-Yao Gao, Li Wang +5
One dimensional fluid/electron Monte Carlo simulations of capacitively coupled Ar/O2 discharges driven by sawtooth up voltage waveforms are performed as a function of the number of…
Electrical Characteristics of the GEC Reference Cell with Impedance Matching: A Two-Dimensional PIC/MCC Modeling Study
Zili Chen, Hongyu Wang, Shimin Yu +5
In this paper, the electrical characteristics of the Gaseous Electronics Conference (GEC) reference cell with impedance matching are investigated through a two-dimensional electros…
Electron heating via the self-excited plasma series resonance in geometrically symmetric multi-frequency capacitive plasmas
E. Schuengel, S. Brandt, Z. Donko +3
The self-excitation of Plasma Series Resonance (PSR) oscillations plays an important role in the electron heating dynamics in Capacitively Coupled Radio Frequency (CCRF) plasmas. I…