293 citations · 860 across the 21 of their papers we have counts for
21 papers
Experimental validation of particle-in-cell/Monte Carlo collisions simulations in low-pressure neon capacitively coupled plasmas
Chan-Won Park, Benedek Horváth, Aranka Derzsi +4
Plasma simulations are powerful tools for understanding fundamental plasma science phenomena and for process optimization in applications. To ensure their quantitative accuracy, th…
Frequency-dependent electron power absorption mode transitions in capacitively coupled argon-oxygen plasmas
Aranka Derzsi, Mate Vass, Ranna Masheyeva +3
Phase Resolved Optical Emission Spectroscopy (PROES) measurements combined with 1d3v Particle-in-Cell/Monte Carlo Collision (PIC/MCC) simulations are performed to investigate the e…
Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges
Katharina Noesges, Maximilian Klich, Aranka Derzsi +5
In capacitively coupled radio frequency (CCRF) discharges, the interaction of the plasma and the surface boundaries is linked to a variety of highly relevant phenomena for technolo…
Electron power absorption in capacitively coupled neon-oxygen plasmas: a comparison of experimental and computational results
A. Derzsi, P. Hartmann, M. Vass +5
Phase Resolved Optical Emission Spectroscopy (PROES) measurements combined with 1d3v Particle-in-Cell/Monte Carlo Collisions (PIC/MCC) simulations are used to study the electron po…
eduPIC: an introductory particle based code for radio-frequency plasma simulation
Zoltan Donko, Aranka Derzsi, Mate Vass +4
For the self-consistent description of various plasma sources operated in the low-pressure (nonlocal, kinetic) regime, the Particle-In-Cell simulation approach, combined with the M…
Electron tennis driven by radio-frequency electric fields in low-pressure plasma sources
Mate Vass, Aranka Derzsi, Julian Schulze +1
We present a detailed analysis of electron trajectories within the sheath regions of capacitively coupled plasmas excited by radio-frequency voltage waveforms at low pressures. Com…