3 papers
physics.plasm-ph2016
A computationally assisted spectroscopic technique to measure secondary electron emission coefficients in radio frequency plasmas
M. Daksha, B. Berger, E. Schuengel +5
A Computationally Assisted Spectroscopic Technique to measure secondary electron emission coefficients (-CAST) in capacitively-coupled radio-frequency plasmas is proposed. This…
physics.plasm-ph2016
Electron heating via the self-excited plasma series resonance in geometrically symmetric multi-frequency capacitive plasmas
E. Schuengel, S. Brandt, Z. Donko +3
The self-excitation of Plasma Series Resonance (PSR) oscillations plays an important role in the electron heating dynamics in Capacitively Coupled Radio Frequency (CCRF) plasmas. I…
physics.plasm-ph2016
On the self-excitation mechanisms of Plasma Series Resonance oscillations in single- and multi-frequency capacitive discharges
Edmund Schuengel, Steven Brandt, Ihor Korolov +3
The self-excitation of plasma series resonance (PSR) oscillations is a prominent feature in the current of low pressure capacitive radio frequency (RF) discharges. This resonance l…