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20082023
most citedSimulation benchmarks for low-pressure plasmas: capacitive discharges

293 citations · 860 across the 21 of their papers we have counts for

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physics.plasm-ph2020

Electron tennis driven by radio-frequency electric fields in low-pressure plasma sources

Mate Vass, Aranka Derzsi, Julian Schulze +1

We present a detailed analysis of electron trajectories within the sheath regions of capacitively coupled plasmas excited by radio-frequency voltage waveforms at low pressures. Com…