293 citations · 860 across the 21 of their papers we have counts for
18 papers · 1 filter
Experimental validation of particle-in-cell/Monte Carlo collisions simulations in low-pressure neon capacitively coupled plasmas
Chan-Won Park, Benedek Horváth, Aranka Derzsi +4
Plasma simulations are powerful tools for understanding fundamental plasma science phenomena and for process optimization in applications. To ensure their quantitative accuracy, th…
Frequency-dependent electron power absorption mode transitions in capacitively coupled argon-oxygen plasmas
Aranka Derzsi, Mate Vass, Ranna Masheyeva +3
Phase Resolved Optical Emission Spectroscopy (PROES) measurements combined with 1d3v Particle-in-Cell/Monte Carlo Collision (PIC/MCC) simulations are performed to investigate the e…
Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges
Katharina Noesges, Maximilian Klich, Aranka Derzsi +5
In capacitively coupled radio frequency (CCRF) discharges, the interaction of the plasma and the surface boundaries is linked to a variety of highly relevant phenomena for technolo…
Electron power absorption in capacitively coupled neon-oxygen plasmas: a comparison of experimental and computational results
A. Derzsi, P. Hartmann, M. Vass +5
Phase Resolved Optical Emission Spectroscopy (PROES) measurements combined with 1d3v Particle-in-Cell/Monte Carlo Collisions (PIC/MCC) simulations are used to study the electron po…
eduPIC: an introductory particle based code for radio-frequency plasma simulation
Zoltan Donko, Aranka Derzsi, Mate Vass +4
For the self-consistent description of various plasma sources operated in the low-pressure (nonlocal, kinetic) regime, the Particle-In-Cell simulation approach, combined with the M…
Electron tennis driven by radio-frequency electric fields in low-pressure plasma sources
Mate Vass, Aranka Derzsi, Julian Schulze +1
We present a detailed analysis of electron trajectories within the sheath regions of capacitively coupled plasmas excited by radio-frequency voltage waveforms at low pressures. Com…
Ion energy and angular distributions in low-pressure capacitive oxygen RF discharges driven by tailored voltage waveforms
Zoltan Donko, Aranka Derzsi, Mate Vass +3
We investigate the energy and angular distributions of the ions reaching the electrodes in low-pressure, capacitively coupled oxygen radio-frequency discharges. These distributions…
A computationally assisted spectroscopic technique to measure secondary electron emission coefficients in radio frequency plasmas
M. Daksha, B. Berger, E. Schuengel +5
A Computationally Assisted Spectroscopic Technique to measure secondary electron emission coefficients (-CAST) in capacitively-coupled radio-frequency plasmas is proposed. This…
Electron heating via the self-excited plasma series resonance in geometrically symmetric multi-frequency capacitive plasmas
E. Schuengel, S. Brandt, Z. Donko +3
The self-excitation of Plasma Series Resonance (PSR) oscillations plays an important role in the electron heating dynamics in Capacitively Coupled Radio Frequency (CCRF) plasmas. I…
On the self-excitation mechanisms of Plasma Series Resonance oscillations in single- and multi-frequency capacitive discharges
Edmund Schuengel, Steven Brandt, Ihor Korolov +3
The self-excitation of plasma series resonance (PSR) oscillations is a prominent feature in the current of low pressure capacitive radio frequency (RF) discharges. This resonance l…
Customized ion flux-energy distribution functions in capacitively coupled plasmas by voltage waveform tailoring
E. Schuengel, Z. Donko, P. Hartmann +3
We propose a method to generate a single peak at a distinct energy in the ion flux-energy distribution function (IDF) at the electrode surfaces in capacitively coupled plasmas. The…
The effect of ambipolar electric fields on the electron heating in capacitive RF plasmas
J. Schulze, Z. Donko, A. Derzsi +2
We investigate the electron heating dynamics in electropositive argon and helium capacitively coupled RF discharges driven at 13.56 MHz by Particle in Cell simulations and by an an…
Kinetic Interpretation of Resonance Phenomena in Low Pressure Capacitively Coupled Radio Frequency Plasmas
S. Wilczek, J. Trieschmann, D. Eremin +8
The kinetic origin of resonance phenomena in capacitively coupled radio frequency plasmas is discovered based on particle-based numerical simulations. The analysis of the spatio-te…
Effects of fast atoms and energy-dependent secondary electron emission yields in PIC/MCC simulations of capacitively coupled plasmas
A. Derzsi, I. Korolov, E. Schuengel +2
In most PIC/MCC simulations of radio frequency capacitively coupled plasmas (CCPs) several simplifications are made: (i) fast neutrals are not traced, (ii) heavy particle induced e…
The effect of the driving frequency on the confinement of beam electrons and plasma density in low pressure capacitive discharges
S. Wilczek, J. Trieschmann, J. Schulze +6
The effect of changing the driving frequency on the plasma density and the electron dynamics in a capacitive radio-frequency argon plasma operated at low pressures of a few Pa is i…
Kinetic simulation of the sheath dynamics in the intermediate radio-frequency regime
M. Shihab, A. T. Elgendy, I. Korolov +6
The dynamics of temporally modulated plasma boundary sheaths is studied in the intermediate radio frequency regime where the applied radio frequency and the ion plasma frequency ar…
Simulation benchmarks for low-pressure plasmas: capacitive discharges
M. M. Turner, A. Derzsi, Z. Donko +4
Benchmarking is generally accepted as an important element in demonstrating the correctness of computer simulations. In the modern sense, a benchmark is a computer simulation resul…
Ionization by bulk heating of electrons in capacitive radio frequency atmospheric pressure microplasmas
T. Hemke, D. Eremin, T. Mussenbrock +5
Electron heating and ionization dynamics in capacitively coupled radio frequency (RF) atmospheric pressure microplasmas operated in helium are investigated by Particle in Cell simu…