6 papers · 1 filter
eduPIC: an introductory particle based code for radio-frequency plasma simulation
Zoltan Donko, Aranka Derzsi, Mate Vass +4
For the self-consistent description of various plasma sources operated in the low-pressure (nonlocal, kinetic) regime, the Particle-In-Cell simulation approach, combined with the M…
Electron tennis driven by radio-frequency electric fields in low-pressure plasma sources
Mate Vass, Aranka Derzsi, Julian Schulze +1
We present a detailed analysis of electron trajectories within the sheath regions of capacitively coupled plasmas excited by radio-frequency voltage waveforms at low pressures. Com…
Ion energy and angular distributions in low-pressure capacitive oxygen RF discharges driven by tailored voltage waveforms
Zoltan Donko, Aranka Derzsi, Mate Vass +3
We investigate the energy and angular distributions of the ions reaching the electrodes in low-pressure, capacitively coupled oxygen radio-frequency discharges. These distributions…
A computationally assisted spectroscopic technique to measure secondary electron emission coefficients in radio frequency plasmas
M. Daksha, B. Berger, E. Schuengel +5
A Computationally Assisted Spectroscopic Technique to measure secondary electron emission coefficients (-CAST) in capacitively-coupled radio-frequency plasmas is proposed. This…
Electron heating via the self-excited plasma series resonance in geometrically symmetric multi-frequency capacitive plasmas
E. Schuengel, S. Brandt, Z. Donko +3
The self-excitation of Plasma Series Resonance (PSR) oscillations plays an important role in the electron heating dynamics in Capacitively Coupled Radio Frequency (CCRF) plasmas. I…
On the self-excitation mechanisms of Plasma Series Resonance oscillations in single- and multi-frequency capacitive discharges
Edmund Schuengel, Steven Brandt, Ihor Korolov +3
The self-excitation of plasma series resonance (PSR) oscillations is a prominent feature in the current of low pressure capacitive radio frequency (RF) discharges. This resonance l…