3 papers
physics.plasm-ph2021
Miniature Plasma Source for In-Situ Scanner Cleaning
Mark van de Kerkhof, Edgar Osorio, Vladimir Krivtsun +3
EUV Lithography is the technology of choice for High-Volume Manufacturing (HVM) of sub-10nm lithography. One of the challenges is to enable in-situ cleaning of functional surfaces…
physics.comp-ph2018
Expansion and fragmentation of liquid metal droplet by a short laser pulse
S. Yu. Grigoryev, B. V. Lakatosh, M. S. Krivokorytov +11
We report an experimental and numerical investigation of the fragmentation mechanisms of micrometer-sized metal droplet irradiated by ultrashort laser pulses. The results of the ex…
physics.plasm-ph2016
Droplet deformation and fragmentation by ultra-short laser pulses
M. S. Krivokorytov, A. Yu. Vinokhodov, Yu. V. Sidelnikov +5
We report on the experimental studies of the deformation and fragmentation of liquid metal droplets by picosecond and subpicosecond laser pulses. The experiments were performed wit…