102 citations · 908 across the 35 of their papers we have counts for
8 papers · 1 filter
Electron transport parameters in CO: scanning drift tube measurements and kinetic computations
M. Vass, I. Korolov, D. Loffhagen +2
This work presents transport coefficients of electrons (bulk drift velocity, longitudinal diffusion coefficient, and effective ionization frequency) in CO2 measured under time-of-f…
Experimental observation and computational analysis of striations in electronegative capacitively coupled radio-frequency plasmas
Yong-Xin Liu, Edmund Schuengel, Ihor Korolov +3
Self-organized spatial structures in the light emission from the ion-ion capacitive RF plasma of a strongly electronegative gas (CF4) are observed experimentally for the first time…
A scanning drift tube apparatus for spatio-temporal mapping of electron swarms
I. Korolov, M. Vass, N. Kh. Bastykova +1
A "scanning" drift tube apparatus, capable of mapping of the spatio-temporal evolution of electron swarms, developing between two plane electrodes under the effect of a homogeneous…
A computationally assisted spectroscopic technique to measure secondary electron emission coefficients in radio frequency plasmas
M. Daksha, B. Berger, E. Schuengel +5
A Computationally Assisted Spectroscopic Technique to measure secondary electron emission coefficients (-CAST) in capacitively-coupled radio-frequency plasmas is proposed. This…
Electron heating via the self-excited plasma series resonance in geometrically symmetric multi-frequency capacitive plasmas
E. Schuengel, S. Brandt, Z. Donko +3
The self-excitation of Plasma Series Resonance (PSR) oscillations plays an important role in the electron heating dynamics in Capacitively Coupled Radio Frequency (CCRF) plasmas. I…
On the self-excitation mechanisms of Plasma Series Resonance oscillations in single- and multi-frequency capacitive discharges
Edmund Schuengel, Steven Brandt, Ihor Korolov +3
The self-excitation of plasma series resonance (PSR) oscillations is a prominent feature in the current of low pressure capacitive radio frequency (RF) discharges. This resonance l…
Customized ion flux-energy distribution functions in capacitively coupled plasmas by voltage waveform tailoring
E. Schuengel, Z. Donko, P. Hartmann +3
We propose a method to generate a single peak at a distinct energy in the ion flux-energy distribution function (IDF) at the electrode surfaces in capacitively coupled plasmas. The…
The effect of ambipolar electric fields on the electron heating in capacitive RF plasmas
J. Schulze, Z. Donko, A. Derzsi +2
We investigate the electron heating dynamics in electropositive argon and helium capacitively coupled RF discharges driven at 13.56 MHz by Particle in Cell simulations and by an an…