Experimental observation and computational analysis of striations in electronegative capacitively coupled radio-frequency plasmas
arXiv:1606.00146 · doi:10.1103/PhysRevLett.116.255002
Abstract
Self-organized spatial structures in the light emission from the ion-ion capacitive RF plasma of a strongly electronegative gas (CF4) are observed experimentally for the first time. Their formation is analyzed and understood based on particle-based kinetic simulations. These "striations" are found to be generated by the resonance between the driving radio-frequency and the eigenfrequency of the ion-ion plasma (derived from an analytical model) that establishes a modulation of the electric field, the ion densities, as well as the energy gain and loss processes of electrons in the plasma. The growth of the instability is followed by the numerical simulations.
Cited by in corpus (12)
- Striations in electronegative capacitively coupled radio-frequency plasmas: effects of the pressure, voltage, and electrode gap
- Electron power absorption in low pressure capacitively coupled electronegative oxygen radio frequency plasmas
- Striations in electronegative capacitively coupled radio-frequency plasmas: analysis of the pattern formation and the effect of the driving frequency
- Plasma Stratification in Radio-Frequency Discharges of Noble Gases
- Electron power absorption in capacitively coupled neon-oxygen plasmas: a comparison of experimental and computational results
- Intense boundary emission destroys normal radio-frequency plasma sheath
- A self-consistent hybrid model of kinetic striations in low-current Argon discharges
- Ionization waves (striations) in low-current DC discharges in noble gases obtained with a hybrid kinetic-fluid model
- Electron kinetics in standing and moving striations in argon gas
- On the Ohmic-dominant heating mode of capacitively-coupled plasma inverted by boundary electron emission
- Influence of the Dufour effect on striations formation in radio-frequency discharges
- eduPIC: an introductory particle based code for radio-frequency plasma simulation