On the Ohmic-dominant heating mode of capacitively-coupled plasma inverted by boundary electron emission
arXiv:2204.07252 · doi:10.1063/5.0096316
Abstract
Electron emission from the boundary is ubiquitous in capacitively coupled plasma (CCP) and precipitates nonnegligible influences on the discharge properties. Here we present the PIC-MCC simulation of an Ohmic-dominant heating mode of capacitively coupled plasma where the stochastic heating vanishes and only Ohmic heating sustains the discharge, due to sheath inversion by boundary electron emission. The inverted CCP features negative sheath potential without Bohm presheath, hence excluding plasma heating due to sheath edge oscillation. The particle and energy transport of the proposed heating mode is analyzed. The influences of boundary electron emission flux, source voltage, and neutral pressure on the transition between classic and Ohmic-dominant CCP heating modes are shown with designated simulation scans. A modified inverse sheath-plasma coupling due to excessive ionization is discovered. In the end, key indicators of the proposed heating mode in plasma diagnostics are provided for future experimental verifications.
arXiv commentletter
References in corpus (5)
- Absence of Debye Sheaths Due to Secondary Electron Emission
- Experimental observation and computational analysis of striations in electronegative capacitively coupled radio-frequency plasmas
- Floating potential of emitting surfaces in plasmas with respect to the space potential
- Intense boundary emission destroys normal radio-frequency plasma sheath
- On the role of secondary electron emission in capacitively coupled radio frequency plasma sheath: a theoretical ground