13 citations · 31 across the 3 of their papers we have counts for
3 papers
Low-temperature formation of platinum silicides on polycrystalline silicon
Kirill V. Chizh, Vladimir P. Dubkov, Vyacheslav M. Senkov +5
Phase formation and transitions in platinum silicide films on polycrystalline Si in the process of Pt magnetron sputtering and heat treatments at different temperatures are studied…
Room-temperature formation of PtSi/PtSi films on poly-Si substrates
V. P. Dubkov, S. A. Mironov, K. V. Chizh +1
We propose a way of formation of thin bilayer PtSi/PtSi films at room temperature on poly-Si substrates by Pt magnetron sputtering and wet etching, obtain such film, invest…
Pt silicide/poly-Si Schottky diodes as temperature sensors for bolometers
V. A. Yuryev, K. V. Chizh, V. A. Chapnin +8
Platinum silicide Schottky diodes formed on films of polycrystalline Si doped by phosphorus are demonstrated to be efficient and manufacturable CMOS-compatible temperature sensors…