On-chip three-dimensional high-Q microcavities fabricated by femtosecond laser direct writing

Jintian Lin, Shangjie Yu, Yaoguang Ma +6

We report on the fabrication of three-dimensional (3D) high-Q whispering gallery microcavities on a fused silica chip by femtosecond laser microfabriction, enabled by the 3D nature…