On-chip three-dimensional high-Q microcavities fabricated by femtosecond laser direct writing

Abstract

We report on the fabrication of three-dimensional (3D) high-Q whispering gallery microcavities on a fused silica chip by femtosecond laser microfabriction, enabled by the 3D nature of femtosecond laser direct writing. The processing mainly consists of formation of freestanding microdisks by femtosecond laser direct writing and subsequent wet chemical etching. CO2 laser annealing is followed to smooth the microcavity surface. Microcavities with arbitrary tilting angle, lateral and vertical positioning are demonstrated, and the quality (Q)-factor of a typical microcavity is measured to be up to 1.07x10^6, which is currently limited by the low spatial resolution of motion stage used during the laser patterning and can be improved with motion stages of higher resolutions.

17 pages, 3 figures

References in corpus (1)

• High-Power Directional Emission from Microlasers with Chaotic Resonators

Cited by in corpus (6)

• Sacrificial Template Replication: Fabrication of arbitrary three-dimensional suspended hollow microstructures in transparent fused silica glass
• Low-threshold whispering-gallery-mode microlasers fabricated in a Nd: glass substrate by three-dimensional femtosecond laser micromachining
• Fabrication of an integrated high-quality-factor (high-Q) optofluidic sensor by femtosecond laser micromachining
• Fabrication of three-dimensional microdisk resonators in calcium fluoride by femtosecond laser micromachining
• High-fidelity glass micro-axicons fabricated by laser-assisted wet etching
• Fabrication of a microresonator-fiber assembly maintaining a high-quality factor by CO2 laser welding