Lithium niobate micro-disk resonators of quality factors above 10^7

Abstract

We report on fabrication of crystalline lithium niobate microresonators with quality factors above 10^7 as measured around 770 nm wavelength. Our technique relies on femtosecond laser micromachining for patterning a mask coated on the lithium niobate on insulate (LNOI) into a microdisk, followed by a chemo-mechanical polishing process for transferring the disk-shaped pattern to the LNOI. Nonlinear processes including second harmonic generation and Raman scattering have been demonstrated in the fabricated microdisk.

3 pages, 4 figures

References in corpus (3)

• Monolithic Ultrahigh-Q Lithium Niobate Microring Resonator
• Integrated high quality factor lithium niobate microdisk resonators
• On-chip electro-optic tuning of a lithium niobate microresonator with integrated in-plane microelectrodes

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