662 citations · 695 across the 5 of their papers we have counts for
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cond-mat.mtrl-sci2017★ 11 cited
Comprehensive modeling of Joule heated cantilever probes
M. Spieser, C. Rawlings, E. Lörtscher +2
The thermo-electrical properties of a complex silicon cantilever structure used in thermal scanning probe lithography are modeled based on well established empirical laws for the t…
cond-mat.mtrl-sci2015★ 662 cited
Advanced scanning probe lithography
Ricardo Garcia, Armin W. Knoll, Elisa Riedo
The nanoscale control afforded by scanning probe microscopes has prompted the development of a wide variety of scanning probe-based patterning methods. Some of these methods have d…