Advanced scanning probe lithography
arXiv:1505.01260 · doi:10.1038/nnano.2014.157
Abstract
The nanoscale control afforded by scanning probe microscopes has prompted the development of a wide variety of scanning probe-based patterning methods. Some of these methods have demonstrated a high degree of robustness and patterning capabilities that are unmatched by other lithographic techniques. However, the limited throughput of scanning probe lithography has prevented their exploitation in technological applications. Here, we review the fundamentals of scanning probe lithography and its use in materials science and nanotechnology. We focus on the methods and processes that offer genuinely lithography capabilities such as those based on thermal effects, chemical reactions and voltage-induced processes.
27 pages, 5 figures. http://www.nature.com/nnano/journal/v9/n8/full/nnano.2014.157.html
References in corpus (7)
- Energy spectra of quantum rings
- AFM local oxidation nanolithography of graphene
- From One Electron to One Hole: Quasiparticle Counting in Graphene Quantum Dots Determined by Electrochemical and Plasma Etching
- Transport Spectroscopy of a Graphene Quantum Dot Fabricated by Atomic Force Microscope Nanolithography
- Mixing of Edge States at a Bipolar Graphene Junction
- Spin-dependent shot noise enhancement in a quantum dot
- Origins of conductance anomalies in a p-type GaAs quantum point contact
Cited by in corpus (23)
- Imaging thermal conductivity with nanoscale resolution using a scanning spin probe
- Magnetic topological lithography: Gateway to the artificial spin ice manifold
- Sub 20 nm Silicon Patterning and Metal Lift-Off Using Thermal Scanning Probe Lithography
- Perspective on Near-Field Radiative Heat Transfer
- Experimental observation of current reversal in a rocking Brownian motor
- Accurate Location and Manipulation of Nano-Scaled Objects Buried under Spin-Coated Films
- Applications of Nanomagnets as Dynamical Systems
- Local anodic oxidation on hydrogen-intercalated graphene layers: oxide composition analysis and role of the silicon carbide substrate
- Solid-phase silicon homoepitaxy via shear-induced amorphization and recrystallization
- Comprehensive modeling of Joule heated cantilever probes
- Local ultra-densification of single-walled carbon nanotube films: modeling and experiment
- Nanometer scale resolution, multi-channel separation of spherical particles in a rocking ratchet with increasing barrier heights
- Graphene quantum dots probed by scanning tunneling spectroscopy and transport spectroscopy after local anodic oxidation
- Mechanical scanning probe lithography of perovskites for fabrication of high-Q planar polaritonic cavities
- Ultimately Thin Metasurface Wave Plates
- Tight bounds and the role of optical loss in polariton-mediated near-field heat transfer
- Mask aligner for ultrahigh vacuum with capacitive distance control
- Erasable superconductivity in topological insulator Bi2Se3 induced by voltage pulse
- Phonon routing in integrated optomechanical cavity-waveguide systems
- Automated and Autonomous Experiment in Electron and Scanning Probe Microscopy
- Placement of Biological Membrane Patches in a Nanofluidic Gap with Control over Position and Orientation
- Enhancing sensitivity in atomic force microscopy for planar tip-on-chip probes
- Controlling the macroscopic electrical properties of reduced graphene oxide by nanoscale writing of electronic channels