783 citations · 882 across the 16 of their papers we have counts for
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physics.optics2011★ 2 cited
Rigorous Simulations of 3D Patterns on Extreme Ultraviolet Lithography Masks
S. Burger, L. Zschiedrich, J. Pomplun +1
Simulations of light scattering off an extreme ultraviolet lithography mask with a 2D-periodic absorber pattern are presented. In a detailed convergence study it is shown that accu…
physics.optics2011★ 3 cited
Finite-Element Method Simulations of High-Q Nanocavities with 1D Photonic Bandgap
S. Burger, J. Pomplun, F. Schmidt +1
High-Q optical resonances in photonic microcavities are investigated numerically using a time-harmonic finite-element method.