783 citations · 882 across the 16 of their papers we have counts for
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physics.optics2006★ 13 cited
Rigorous Simulation of 3D Masks
S. Burger, R. Köhle, L. Zschiedrich +4
We perform 3D lithography simulations by using a finite-element solver. To proof applicability to real 3D problems we investigate DUV light propagation through a structure of size…
physics.optics2006★ 20 cited
Benchmark of FEM, Waveguide and FDTD Algorithms for Rigorous Mask Simulation
S. Burger, R. Köhle, L. Zschiedrich +4
An extremely fast time-harmonic finite element solver developed for the transmission analysis of photonic crystals was applied to mask simulation problems. The applicability was pr…
physics.comp-ph2006
Advanced Finite Element Method for Nano-Resonators
L. Zschiedrich, S. Burger, B. Kettner +1
Miniaturized optical resonators with spatial dimensions of the order of the wavelength of the trapped light offer prospects for a variety of new applications like quantum processin…