783 citations · 882 across the 16 of their papers we have counts for
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physics.optics2008★ 3 cited
Finite Element Simulation of Light Propagation in Non-Periodic Mask Patterns
L. Zschiedrich, F. Schmidt
Rigorous electromagnetic field simulations are an essential part for scatterometry and mask pattern design. Today mainly periodic structures are considered in simulations. Non-peri…
physics.optics2008★ 4 cited
A Rigorous Finite-Element Domain Decomposition Method for Electromagnetic Near Field Simulations
L. Zschiedrich, S. Burger, A. Schädle +1
Rigorous computer simulations of propagating electromagnetic fields have become an important tool for optical metrology and design of nanostructured optical components. A vectorial…