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3D finite element simulation of optical modes in VCSELs
M. Rozova, J. Pomplun, L. Zschiedrich +2
We present a finite element method (FEM) solver for computation of optical resonance modes in VCSELs. We perform a convergence study and demonstrate that high accuracies for 3D set…
Investigation of 3D Patterns on EUV Masks by Means of Scatterometry and Comparison to Numerical Simulations
S. Burger, L. Zschiedrich, J. Pomplun +4
EUV scatterometry is performed on 3D patterns on EUV lithography masks. Numerical simulations of the experimental setup are performed using a rigorous Maxwell solver. Mask geometry…
Rigorous Simulations of 3D Patterns on Extreme Ultraviolet Lithography Masks
S. Burger, L. Zschiedrich, J. Pomplun +1
Simulations of light scattering off an extreme ultraviolet lithography mask with a 2D-periodic absorber pattern are presented. In a detailed convergence study it is shown that accu…
Finite-Element Method Simulations of High-Q Nanocavities with 1D Photonic Bandgap
S. Burger, J. Pomplun, F. Schmidt +1
High-Q optical resonances in photonic microcavities are investigated numerically using a time-harmonic finite-element method.