783 citations · 3.4k across the 97 of their papers we have counts for
5 papers · 1 filter
Rigorous FEM-Simulation of EUV-Masks: Influence of Shape and Material Parameters
J. Pomplun, S. Burger, F. Schmidt +4
We present rigorous simulations of EUV masks with technological imperfections like side-wall angles and corner roundings. We perform an optimization of two different geometrical pa…
Rigorous Simulation of 3D Masks
S. Burger, R. Köhle, L. Zschiedrich +4
We perform 3D lithography simulations by using a finite-element solver. To proof applicability to real 3D problems we investigate DUV light propagation through a structure of size…
Domain Decomposition Method for Maxwell's Equations: Scattering off Periodic Structures
Achim Schädle, Lin Zschiedrich, Sven Burger +2
We present a domain decomposition approach for the computation of the electromagnetic field within periodic structures. We use a Schwarz method with transparent boundary conditions…
Benchmark of FEM, Waveguide and FDTD Algorithms for Rigorous Mask Simulation
S. Burger, R. Köhle, L. Zschiedrich +4
An extremely fast time-harmonic finite element solver developed for the transmission analysis of photonic crystals was applied to mask simulation problems. The applicability was pr…
Advanced Finite Element Method for Nano-Resonators
L. Zschiedrich, S. Burger, B. Kettner +1
Miniaturized optical resonators with spatial dimensions of the order of the wavelength of the trapped light offer prospects for a variety of new applications like quantum processin…