783 citations · 859 across the 12 of their papers we have counts for
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Electromagnetic Field Simulations of Isolated and Periodic 3D Photomask Patterns
S. Burger, L. Zschiedrich, F. Schmidt +3
We present rigorous 3D EMF simulations of isolated features on photomasks using a newly developed finite-element method. We report on the current status of the finite-element solve…
3D Simulations of Electromagnetic Fields in Nanostructures using the Time-Harmonic Finite-Element Method
S. Burger, L. Zschiedrich, F. Schmidt +4
Rigorous computer simulations of propagating electromagnetic fields have become an important tool for optical metrology and optics design of nanostructured components. As has been…
FEM investigation of leaky modes in hollow core photonic crystal fibers
J. Pomplun, R. Holzlöhner, S. Burger +2
Hollow-core holey fibers are promising candidates for low-loss guidance of light in various applications, e.g., for the use in laser guide star adaptive optics systems in optical a…
Goal Oriented Adaptive Finite Element Method for the Precise Simulation of Optical Components
L. Zschiedrich, S. Burger, J. Pomplun +1
Adaptive finite elements are the method of choice for accurate simulations of optical components. However as shown recently by Bienstman et al. many finite element mode solvers fai…