292 citations · 1.7k across the 17 of their papers we have counts for
4 papers · 2 filters
A superhigh-frequency optoelectromechanical system based on a slotted photonic crystal cavity
Xiankai Sun, Xufeng Zhang, Menno Poot +2
We develop an all-integrated optoelectromechanical system that operates in the superhigh frequency band. This system is based on an ultrahigh-Q slotted photonic crystal (PhC) nanoc…
Second harmonic generation in phase matched aluminum nitride waveguides
W. H. P. Pernice, C. Xiong, C. Schuck +1
We demonstrate second order optical nonlinearity in aluminum nitride on insulator substrates. Using sputter-deposited aluminum nitride thin films we realize nanophotonic waveguides…
High Q micro-ring resonators fabricated from polycrystalline aluminum nitride films for near infrared and visible photonics
Wolfram H. P. Pernice, Chi Xiong, Hong X. Tang
We demonstrate wideband integrated photonic circuits in sputter-deposited aluminum nitride (AlN) thin films. At both near-infrared and visible wavelengths, we achieve low propagati…
High-Q aluminum nitride photonic crystal nanobeam cavities
W. H. P. Pernice, C. Xiong, C. Schuck +1
We demonstrate high optical quality factors in aluminum nitride (AlN) photonic crystal nanobeam cavities. Suspended AlN photonic crystal nanobeams are fabricated in sputter-deposit…